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The purpose of this Document is to provide specification for hydrogen chloride (HCl) that is used in the semiconductor industry
This Test Method assumes the existence of a reliable moisture analyzer
6-95 (technical revision)
Leach-out procedures referenced within this Guide provide values for both static and dynamic conditions
D01200 - SEMI D12 - Specification for Edge Condition of Flat Panel Display (FPD) Substrates Revision:SEMI D12-95 (Reapproved 0703) - Inactive The purpose of this DocumentThis Standard was technically approved by the Flat Panel Display Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on April 28, 2003. Available at www. semi. org in July 2003; originally published in 1995. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are
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