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Two major changes have occurred since this Test Method was initially adopted
This Document covers requirements for octafluorocyclobutane (C4F8) used in the semiconductor industry
The purpose of the test method is to standardize the procedures
E04400 - SEMI E44 - Guide for Procurment and Acceptance of Minienvironments StdVol-undefined Subordinate Documents:NOTICE: This Document was balloted and approved for withdrawal in 2001. It is widely felt that the requirements of buyers can be standardized. The purpose of this guide is to provide standardized procedures for the procurement and acceptance of minienvironments. It should assist the buyer in producing a procurement specification by providing a comprehensive and structured overview and checklists of all the parameters relating to procurement of