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SEMI E62-1101 (technical revision)
5 µm to 2 µm thick
本スタンダードは，プロセス装置または測定装置においてボックスを開け，300 mmウェーハのアンロードおよびロードのためにウェーハハンドラにウェーハを渡すための装置側の機械的インタフェースを規定する。ボックスオープナとローダーユニットは1つ以上の（SEMI E15
including FOUPs and open cassettes
E18900 - SEMI E189 - Specification for Equipment Management of Consumables and Durables (EMCD) Revision:SEMi E189-0524E - Current SEMI E62-1101 (technical revision)E This Standard was editorially modified to correct a publication error. A correction was made to Figure 1. This Specification provides a standardized behavior for host communication with manufacturing equipment during the removal, installation and usage of consumables and durables. This Specification defines objects and state models that define the interaction between the host and equipment in the following scenarios: Durable removal, installation,
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